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GB/T 43313-2023_Chinese: Test method for surface quality and micropipe density of polished silicon carbide wafers - Confocal and differential interferometry optics (Chinese: 碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法) Note/Careful: Text of PDF is in Chinese (not English). Delivery (PDF in Chinese): 2 working-hours typically, ASAP English versions: GB/T 43313-2023
